使用FEMAG晶体生长模拟仿真软件以及自主开发的PVT法有限元传质模块对全自动、双电阻加热物理气相沉积炉开展了AlN晶体生长工艺过......

With the rapid development of nanophotonics,the study of surface plasmons derived therefrom has also come into view.In e......